Mechanical protection for semiconductor edge-emitting ridge waveguide lasers

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United States of America Patent

PATENT NO 7095766
APP PUB NO 20040264529A1
SERIAL NO

10602298

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A high-speed, directly modulated ridge waveguide laser includes: a ridge structure at a junction surface of the laser chip; and a plurality of pads only on non-active areas of the junction surface, where the plurality of pads protrude beyond an edge of the ridge structure. The laser chip can thus be held by a manufacturing tool, such that the manufacturing tool abuts the pads without abutting the ridge structure. In this manner, the ridge structure of the laser is protected from damage due to contacts by manufacturing tools, increasing the device yield of a wafer. By providing the pads only on the non-active areas of the junction surface, parasitic capacitance for contacts in the active areas can be properly controlled.

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Patent Owner(s)

  • EMCORE CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nguyen, Trinh D San Gabriel, CA 2 2
Tsai, Charles Su-Chang Hacienda Heights, CA 6 185
Witzigmann, Bernd Burbank, CA 3 7

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