Removal of surface contaminants by irradiation from a high-energy source

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Mar 31, 1992
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Nov 9, 1990
filing date
Jul 8, 1988

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Abstract

A method and apparatus for removing surface contaminants from the surface of a substrate by high-energy irradiation is provided. The invention enables removal of surface contaminants without altering of the substrate's underlying molecular structure. The source of high-energy irradiation may comprise a pulsed laser.

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CAULDRON LIMITED PARTNERSHIP	A DELAWARE LIMITED PARTNERSHIP

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Engelsberg, Audrey C	23 Elmer Pl., Milton, VT 05468	8	544

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Removal of surface contaminants by irradiation from a high-energy source

Number of patents in Portfolio can not be more than 2000

United States of America Patent

07611198

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PATENT NO	5099557
SERIAL NO	07611198
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07611198

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