Lithography system with an embedded cleaning module

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United States of America Patent

PATENT NO 11378894
SERIAL NO

16665585

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Abstract

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The present disclosure provides a lithography system. The lithography system includes an exposing module configured to perform a lithography exposing process using a mask secured on a mask stage; and a cleaning module integrated in the exposing module and designed to clean at least one of the mask and the mask stage using an attraction mechanism.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Shih-Ming Hsinchu County, TW 179 1571
Chen, Chia-Chen Hsinchu, TW 102 819
Chen, Jeng-Horng Hsin-Chu, TW 137 2709
Chien, Shang-Chieh Taipei, TW 170 538
Hsieh, Hung-Chang Hsin-Chu, TW 78 950
Lu, Chi-Lun Hsinchu, TW 42 232
Wu, Jui-Ching Hsinchu, TW 17 105
Yen, Anthony Hsinchu, TW 156 3013
Yu, Chia-Hao Hsinchu, TW 163 1559

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