Triple-layered ceramic heater
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 27, 1994
Issued Date -
N/A
app pub date -
Apr 12, 1993
filing date -
Mar 18, 1991
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An improved double-layered ceramic heater, which is used for heating a semiconductor silicon wafer mounted thereon in the processing of semiconductor devices, is proposed to be freed from the problems in the prior art ceramic heaters in respects of service life and contamination of silicon wafers mounted thereon. Different from conventional ceramic heaters having a ceramic substrate plate of, for example, boron nitride provided with a heater element layer of a metal foil, the inventive ceramic heater has a substrate plate of silicon nitride and a heater element layer of graphite is formed thereon by the CVD method so that the ceramic heater is not responsible for contamination of semiconductor silicon by virtue of absence of any element which can be a disturbing dopant of the semiconductor. The problem of contamination with carbon can be solved by further providing a coating layer of silicon nitride by the CVD method.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully