Optical device and method for manufacturing the same
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United States of America Patent
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Oct 14, 2008
Grant Date -
Mar 15, 2007
app pub date -
Aug 31, 2006
filing date -
Sep 12, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
A method for manufacturing an optical device is provided. The device includes an optical waveguide path having a Bragg grating and a movable portion disposed near the Bragg grating. A displacement of the movable portion provides a change of spacing of the Bragg grating so that a light passing through the optical waveguide path is changed. The optical device detects the physical quantity based on a change of the light. The method includes steps of: forming the optical waveguide path with the Bragg grating on a first part of a silicon substrate; and forming the movable portion on a second part of the silicon substrate.
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