Electrostatic chuck and production method therefor
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United States of America Patent
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-
Apr 10, 2001
Grant Date -
N/A
app pub date -
Aug 23, 1999
filing date -
Aug 31, 1998
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An electrostatic chuck according to the present invention exhibits a greater attractive force by virtue of the Johnson-Rahbeck effect, while ensuring satisfactory insulation in a ceramic portion present below an electrostatic attraction electrode thereof in a temperature range of 250 to 450.degree. C. The electrostatic chuck is produced by superposing green sheets printed with a conductive paste and green sheets not printed with the conductive paste in a predetermined order with a binding liquid applied on the respective green sheets, heat- and press-bonding the superposed green sheets and firing the heat- and press-bonded green sheets. During the production, a conductive component of the electrostatic attraction electrode is diffused into the ceramic portion present between the electrode and an attractive surface of the chuck.
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