Surface treatment apparatus and surface treatment method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11764084
APP PUB NO 20210159092A1
SERIAL NO

16951718

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Disclosed is a substrate treatment apparatus. The apparatus includes a support unit that supports and rotates a substrate and a spray unit equipped with one or more nozzles to spray a dual fluid that is a mixture of a cleaning agent and carbon dioxide onto the substrate.

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Patent Owner(s)

  • SEMES CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cui, Cheng Bin Suwon-si, KR 3 0
Goh, Jung Suk Hwaseong-si, KR 12 0
Heo, Pil Kyun Hwaseong-si, KR 21 5
Hong, Ji Su Asan-si, KR 12 6
Kim, Kuk Saeng Goyang-si, KR 11 0
Kim, Sun Mi Jeollanam-do, KR 50 163

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