Optical filter and optical module having optical filter

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9195047
APP PUB NO 20140153098A1
SERIAL NO

14176615

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Abstract

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An optical filter includes a first substrate, a first mirror formed on the first substrate, a second substrate coupled to the first substrate, the second substrate including a concave portion, a second mirror formed on the concave portion and facing the first mirror, and an electrode formed on the second substrate and around the second mirror. The first substrate includes a plurality of first hinge portions and a plurality of second hinge portions inside the plurality of first hinge portions.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Funakawa, Takeo Nagano, JP 19 162
Funasaka, Tsukasa Nagano, JP 37 636
Hanamura, Yuki Nagano, JP 36 244

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