Additive for polishing composition

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United States of America Patent

PATENT NO 8420539
APP PUB NO 20120193573A1
SERIAL NO

13442125

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Abstract

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The invention relates to an additive for polishing composition, which can ensure stable polishing properties. The additive for polishing composition contains one or more amine compounds and an alcohol. The one or more amine compounds contain a quaternary ammonium salt. When the one or more amine compounds are contained in high concentration, the occurrence of precipitation of the amine compound can be prevented by including the alcohol.

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Patent Owner(s)

  • NITTA HAAS INCORPORATED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Higashigaki, Ryoko Kyotanabe, JP 2 1
Makino, Hiroshi Kyotanabe, JP 140 2786
Teramoto, Masashi Kyotanabe, JP 11 67

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