Apparatus and methods for systematic non-uniformity correction using a gas cluster ion beam

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Jun 23, 2009
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Oct 2, 2008
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Mar 30, 2007
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Mar 30, 2007

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Abstract

Embodiments of an apparatus and methods for correcting systematic non-uniformities using a gas cluster ion beam are generally described herein. Other embodiments may be described and claimed.

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TEL EPION INC.

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G21K:TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNET....

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Inventor Name	Address	# of filed Patents	Total Citations
Caliendo, Steve	Ashby, US	2	25
Hofmeester, Nicholas J	Danvers, US	2	17

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Apparatus and methods for systematic non-uniformity correction using a gas cluster ion beam

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United States of America Patent

11694557

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PATENT NO	7550748
APP PUB NO	20080237491A1
SERIAL NO	11694557
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
June 23, 2009	US,7550748,B2 US7550748B2	GRANTED PATENT AS SECOND PUBLICATION
October 02, 2008	US,20080237491,A1 US20080237491A1	FIRST PUBLISHED PATENT APPLICATION

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11694557

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