Pressure sensor

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United States of America Patent

PATENT NO 11422043
APP PUB NO 20190285489A1
SERIAL NO

16345174

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A pressure sensor 1 according to the first aspect of the invention includes: a substrate 50; and a functional element 40 which is laid on the substrate 50 and is composed of functional titanium oxide including crystal grains of at least one of β-phase trititanium pentoxide (β-Ti3O5) and λ-phase trititanium pentoxide (λ-Ti3O5) and having the property that at least a portion of crystal grains of at least one of β-phase trititanium pentoxide (β-Ti3O5) and λ-phase trititanium pentoxide (λ-Ti3O5) change into crystal grains of titanium dioxide (TiO2) when the functional titanium oxide is heated to 350° C. or higher. The substrate 50 includes a substrate thin-film section 51 having a thin film form in which the thickness in the stacking direction of the substrate 50 and the functional element 40 is smaller than that in the other directions.

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Patent Owner(s)

  • PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Furuta, Tsutomu Hyogo, JP 15 23
Nakamura, Yoshitaka Osaka, JP 215 1643
Ueda, Takeshi Hyogo, JP 157 1802
Yaguchi, Mitsuo Osaka, JP 19 54
Yoden, Hiroyoshi Osaka, JP 11 56

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