Apparatus and method for removing photoresist layer from alignment mark

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United States of America Patent

PATENT NO 11747742
APP PUB NO 20180292758A1
SERIAL NO

15484734

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Abstract

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An apparatus for removing a photoresist layer from at least one alignment mark of a wafer is provided. The apparatus includes a holder, a solvent dispenser, and a suction unit. The holder is used to support the wafer, wherein the alignment mark is formed in a peripheral region of the wafer. The solvent dispenser is used to spray a solvent onto the photoresist layer on the alignment mark of the wafer to generate a dissolved photoresist layer. The suction unit is used to remove the dissolved photoresist layer and the solvent from the wafer through exhausting.

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Patent Owner(s)

  • VISERA TECHNOLOGIES COMPANY LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Yi-Chang Yunlin County, TW 14 18
Chao, Yuan-Chun Hsinchu, TW 2 2
Chen, Wei-Chuan Changhua County, TW 82 1802
Liao, Tian-Wen New Taipei, TW 1 0
Tseng, Yu-Ming Hsinchu, TW 4 3

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