Bake plate having engageable thermal mass

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7274005
APP PUB NO 20060237430A1
SERIAL NO

11174681

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A bake station comprising a bake plate adapted to heat a substrate supported on an upper surface of the bake plate, the bake plate vertically moveable between an upper baking position and a lower cooling position; and a plurality of heat sinks adapted to be engageably coupled to a lower surface of the bake plate when the bake plate is in the lower cooling position.

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Patent Owner(s)

  • SCREEN SEMICONDUCTOR SOLUTIONS CO., LTD.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishikawa, Tetsuya Saratoga, CA 352 12918
Quach, David H San Jose, CA 43 952

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