Periodic patterns and technique to control misalignment between two layers
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 2, 2010
Grant Date -
Jun 7, 2007
app pub date -
Feb 9, 2007
filing date -
Apr 10, 2001
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully