Pellicle, exposure master, exposure device and method for manufacturing semiconductor device

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United States of America Patent

PATENT NO 11852968
APP PUB NO 20200401039A1
SERIAL NO

17010929

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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To provide a pellicle in which outgas from an adhesive layer is suppressed. The pellicle includes a pellicle film, a support frame for supporting the pellicle film, a protrusion part arranged in the support frame, a first adhesive layer arranged on the protrusion part; and an inorganic material layer arranged at a position closer to the pellicle film than the first adhesive layer. The inorganic material layer may include a first inorganic material layer arranged at a first side surface of the first adhesive layer, the first side surface of the first adhesive layer intersecting the pellicle film, and arranged at a position closer to the pellicle film.

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Patent Owner(s)

Patent OwnerAddress
MITSUI CHEMICALS INCTOKYO JAPAN TOKYO METROPOLIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Biyajima, Tsuneaki Iwakuni, JP 8 34
Ishikawa, Hisako Ichihara, JP 10 26
Kohmura, Kazuo Chiba, JP 44 185
Okubo, Atsushi Tokyo, JP 93 822
Ono, Yosuke Sodegaura, JP 22 101
Taneichi, Daiki Chiba, JP 13 62

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