Method for coating temperature-sensitive substrates with polycrystalline diamond
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United States of America Patent
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Nov 2, 2021
Grant Date -
Sep 10, 2020
app pub date -
Feb 18, 2020
filing date -
Aug 18, 2017
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Abstract
A method for coating temperature-sensitive substrates with polycrystalline diamond by a hot-wire CVD method, in which hydrogen and at least one carbon carrier gas are fed into a coating chamber. The fed gases are split at an electrically heated wire in such a way that carbon is formed and deposits on the temperature-sensitive substrate in the form of the diamond modification thereof. The substrate is arranged in the coating chamber, which is at a reduced pressure, and electrical power to electrically heat the wire is adjustable. The method is performed cyclically in respect of the electrical power that is fed to electrically heat the wire. A basic power is fed as lower threshold value for a predetermined time (basic load phase) and is increased for a further predetermined time to a maximum power as an upper threshold value (pulse phase) and is then reduced again to the basic power.
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Patent Owner(s)
Patent Owner | Address | |
---|---|---|
GUEHRING KG | HERDERSTRASSE 50-54 ALBSTADT 72458 |
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Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Garrn, Immo | Ertingen, DE | 5 | 0 |
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