Sealing device, component and lithography apparatus

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United States of America Patent

PATENT NO 11740562
SERIAL NO

17490197

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Abstract

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A sealing device seals a first component part of a lithography apparatus vis-à-vis a multiplicity of second component parts of the lithography apparatus. The sealing device includes a multiplicity of sealing rings and a multiplicity of connection locations. The sealing rings are connected to one another with the aid of the connection locations.

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Patent Owner(s)

  • CARL ZEISS SMT GMBH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bader, Dieter Goeggingen, DE 16 82
Fluegge, Ole Bartholomae, DE 6 95
Ostendorf, Alexander Langenau, DE 3 0

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