Wafer container and method for holding wafer

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11387124
APP PUB NO 20210013057A1
SERIAL NO

17033938

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Provided is a wafer container including a frame having a first sidewall and a second sidewall extending along a YZ plane; a plurality of first support structures disposed on the first sidewall and arranged along a Z direction; and a plurality of second support structures disposed on the second sidewall and arranged along the Z direction. One of the plurality of first support structures is horizontally aligned with a corresponding second support structure to constitute a wafer holder. The wafer holder includes a plurality of island structures to hold a wafer in a XY plane, and the plurality of island structures are separated to each other along a X direction. A method for holding at least one wafer is also provided.

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First Claim

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huang, Jui-Ming Kaohsiung, TW 3 6
Jen, Chi-Chung Kaohsiung, TW 39 24
Liao, Wan-Ting Taipei, TW 4 2
Liu, Wei-Kang Taichung, TW 16 19

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