Pumping structure, particle detector and method for pumping

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United States of America Patent

PATENT NO 11732705
APP PUB NO 20210040943A1
SERIAL NO

16967828

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A pumping structure comprises at least two membranes, at least two actuation chambers, one evaluation chamber comprising an opening to the outside of the pumping structure, and at least three electrodes. Each membrane is arranged between two electrodes in a vertical direction which is perpendicular to the main plane of extension of the pumping structure, each actuation chamber is arranged between one of the membranes and one of the electrodes in vertical direction, and each actuation chamber is connected to the evaluation chamber via a channel. Furthermore, a particle detector and a method for pumping are provided.

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Patent Owner(s)

  • AMS AG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brivio, Jacopo Eindhoven, NL 1 0
Coppeta, Raffaele Eindhoven, NL 4 3
Pires, Singulani Anderson Eindhoven, NL 6 1
Vescoli, Verena Eindhoven, NL 5 12

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