One step laser fabrication of polymer wave-guided structures having varying width and height, and their application to pigtailing of optical fibers

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United States of America Patent

PATENT NO 6824934
APP PUB NO 20030054092A1
SERIAL NO

09952200

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention relates to lithographically formed, tapered waveguides connectable to optical fibers. A tapered waveguide is formed by imagewise exposing, in an oxygen containing atmosohere, and developing a lithographic composition on a substrate. Exposure is conducted by a converging beam of laser light which has a greater intensity a the bottom surface of the coating composition, a lesser intensity at the top surface, and a gradually decreasing intensity from the bottom surface to the top surface of the coating composition. Either the substrate is moved with respect to the converging beam, or the converging beam is moved with respect to the substrate along a linear path. Either the moving is done at a gradually increasing or gradually decreasing velocity or one gradually increases or decreases the intensity of the beam of laser light along the substrate. After developing and removing the non-polyrnerized portion of the coating composition, a tapered waveguide is fornnd on the substrate. The tapered waveguide may be attached to an optical fiber.

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Patent Owner(s)

  • E. I. DU PONT DE NEMOURS AND COMPANY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Eldada, Louay Acton, MA 63 2072
Yardley, James T Morristown, NJ 33 1059

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