Inspection apparatus that detects defect in image and inspection method and storage medium thereof

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United States of America Patent

PATENT NO 11587223
SERIAL NO

17007250

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Abstract

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According to one embodiment, an inspection apparatus includes an image generation device which generates a second image corresponding to a first image and a defect detection device which detects a defect in the second image with respect to the first image. The defect detection device is configured to extract a first partial region in which an amount of change of a luminance of the first image and an amount of change of a luminance of the second image have a correlation, and correct, in the first partial region, the luminance of the first image with respect to the luminance of the second image.

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Patent Owner(s)

  • KABUSHIKI KAISHA TOSHIBA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Honguh, Yoshinori Yokohama Kanagawa, JP 53 630
Okano, Hideaki Yokohama Kanagawa, JP 83 314

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