RF generator device and substrate processing apparatus

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United States of America Patent

PATENT NO 11901159
SERIAL NO

17268100

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Abstract

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A radio frequency (RF) generator device for supplying RF powers of different frequencies to multiple antennas disposed in a chamber is provided. The RF generator device includes a plurality of RF generators configured to supply the RF powers of the different frequencies to the multiple antennas, and a plurality of RF controllers configured to control the RF generators, respectively. Each of the RF controllers includes a fast Fourier transformer, and a filter. The fast Fourier transformer performs fast Fourier transform on a signal introduced as a reflected wave to decompose the signal into frequency components, and the filter removes waves having frequency components that are not outputted from the corresponding RF generator.

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Patent Owner(s)

Patent OwnerAddress
HITACHI KOKUSAI ELECTRIC INC15-12 NISHI-SHIMBASHI 2-CHOME MINATO-KU TOKYO 105-8039

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Egashira, Sunao Tokyo, JP 3 0
Fujimoto, Naoya Tokyo, JP 12 78
Oshida, Yoshiyuki Tokyo, JP 10 23
Takahashi, Naoto Tokyo, JP 109 470

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