Insulated gate semiconductor device using compound semiconductor at the channel

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United States of America Patent

PATENT NO 5036374
SERIAL NO

07180359

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Abstract

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An insulated gate semiconductor device comprises a channel region of compound semiconductor of one conductivity type, source and drain regions of the other conductivity type spaced apart by the channel region, a gate insulation film provided on the channel region, a gate electrode provided on the insulating film and a silicon monocrystal thin film having a thickness of 100 atoms or less inserted between the channel region and the gate insulation film.

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Patent Owner(s)

  • SEIKO INSTRUMENTS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Shimbo, Masafumi Tokyo, JP 17 536

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