Method of forming gallium oxide film

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United States of America Patent

PATENT NO 11515146
APP PUB NO 20200194256A1
SERIAL NO

16697273

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Abstract

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A method of forming a gallium oxide film is provided, and the method may include supplying mist of a material solution comprising gallium atoms and chlorine atoms to a surface of a substrate while heating the substrate so as to form the gallium oxide film on the surface of the substrate, in which a molar concentration of chlorine in the material solution is equal to or more than 3.0 times and equal to or less than 4.5 times a molar concentration of gallium in the material solution.

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Patent Owner(s)

  • DENSO CORPORATION; NATIONAL UNIVERSITY CORPORATION KYOTO INSTITUTE OF TECHNOLOGY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nagaoka, Tatsuji Nagakute, JP 70 1246
Nishinaka, Hiroyuki Kyoto, JP 23 9
Yoshimoto, Masahiro Kyoto, JP 44 130

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