Method for the closure of openings in a film
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United States of America Patent
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Jun 26, 2007
Grant Date -
Nov 11, 2004
app pub date -
Dec 22, 2003
filing date -
Dec 24, 2002
priority date (Note) -
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Abstract
A method is described for closing openings in a film, for example, in microelectronic process technology, whereby substantially no deposition material passes through the openings, which can be important if fragile micro devices are positioned under the openings. The closure of these openings can cause an underlying cavity to be hermetically sealed, in which an object can be located. In particular the method provides a way for hermetically sealing cavities under controlled atmosphere and pressure in the encapsulation and sealing processes of cavities comprising fragile content. The cavities may comprise for example Micro Electro Mechanical Systems (MEMS). The method may be used for encapsulating devices which may require a controlled atmosphere and pressure encapsulation such as micro accelerometers, micro gyroscopes, micro tubes, vibration micro sensors, micro mirrors, micro mechanical resonators or 'resonant strain gauges', micro mechanical filters, micro switches, micro electrical circuits, micro relays, Integrated Circuits with air gaps etc.
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- 15 United States
- 10 France
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- 5 Korea
- 2 Other
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- IMEC
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Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Rusu, Cristina | Molndal, SE | 2 | 65 |
Witvrouw, Ann | Herent, BE | 20 | 228 |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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