Sample observation method and transmission electron microscope
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United States of America Patent
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Apr 27, 2010
Grant Date -
Nov 20, 2008
app pub date -
May 13, 2008
filing date -
May 14, 2007
priority date (Note) -
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Abstract
There is provided a transmission electron microscope capable of a capturing continuous field-of-view image without having an influence of aberration. In order to obtain an electron beam image of the whole of a predetermined range of a sample, the transmission electron microscope specifies a region with little aberration in a field of view of an image pickup device, moves a sample stage in units of the specified regions, captures the whole of the predetermined range as a plurality of continuous field-of-view images.
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