Adaptive inset for wafer cassette system

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United States of America Patent

PATENT NO 11189510
SERIAL NO

16655503

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Abstract

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The present disclosure, in some embodiments, relates to a method of transporting a semiconductor wafer. The method includes transferring a semiconductor wafer into a first wafer slot of a second plurality of wafer slots within an adaptive inset. The adaptive inset is arranged within an interior cavity of a wafer cassette having a first plurality of wafer slots while transferring the semiconductor wafer into the first wafer slot. The wafer cassette and the adaptive inset are transported into a loading port of a semiconductor processing tool configured to perform a fabrication process on the semiconductor wafer.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Chia-Yuan Hsinchu, TW 19 204
Chu, Po-Tao New Taipei, TW 45 216
Lee, Ming-Hsien Zhubei, TW 80 549
Lu, Hung-Jen Hsinchu, TW 5 5

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