Imprint apparatus, imprinting method, and method of manufacturing article

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United States of America Patent

PATENT NO 11573487
APP PUB NO 20190057881A1
SERIAL NO

16101952

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Abstract

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An imprint apparatus that molds an imprint material on a substrate with a mold, the imprint apparatus including a applying device that includes a discharge surface in which a discharge opening is formed, the applying device applying the imprint material to the substrate through the discharge opening, and a measuring device that measures the position of the discharge opening by having the measuring device measure a position of an uneven structure formed in a protruded shape or a recessed shape with respect to a direction perpendicular to the discharge surface.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kawahara, Nobuto Utsunomiya, JP 13 79
Mita, Yutaka Utsunomiya, JP 18 59

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