System and method of mitigating effects of component deflection in a probe card analyzer
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United States of America Patent
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Jan 30, 2007
Issued Date -
N/A
app pub date -
Mar 12, 2004
filing date -
Mar 14, 2003
priority date (Note) -
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Abstract
A system and method of mitigating the effects of component deflections in a probe card analyzer system may implement three-dimensional comparative optical metrology techniques to model deflection characteristics. An exemplary system and method combine non-bussed electrical planarity measurements with fast optical planarity measurements to produce 'effectively loaded' planarity measurements.
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