Matching circuit for megasonic transducer device
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United States of America Patent
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Mar 13, 2007
Issued Date -
N/A
app pub date -
Jan 12, 2005
filing date -
Jul 12, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method and apparatus for matching impedance magnitude and impedance phase for an acoustic-wave transducer load and an RF power source. The acoustic-wave transducer load has a load impedance magnitude and phase. The RF power source has a source impedance magnitude and phase. In one embodiment of the invention, a transformer matches the source and load impedance magnitudes. A capacitor, connected in series with the transformer, matches the source impedance phase to the load impedance phase.
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