Controlled deposition of materials using a differential pressure regime

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United States of America Patent

PATENT NO 11751468
APP PUB NO 20210351350A1
SERIAL NO

17380169

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Abstract

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Methods and devices for controlling pressures in microenvironments between a deposition apparatus and a substrate are provided. Each microenvironment is associated with an aperture of the deposition apparatus which can allow for control of the microenvironment.

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Patent Owner(s)

  • UNIVERSAL DISPLAY CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Harikrishna, Mohan Siddharth Plainsboro, US 45 246
McGraw, Gregory Yardley, US 91 476
Quinn, William E Whitehouse Station, US 119 1767
Xu, Xin Plainsboro, US 258 1473

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