Linear motor for vacuum and vacuum processing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11418101
APP PUB NO 20200126749A1
SERIAL NO

16600010

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Since wires connected to a linear motor are routed in a vacuum sample chamber, outgassing is generated from wire coating and efficiency of assembly operations is reduced. Further, there is a problem that thrust generation efficiency of the linear motor is reduced when a gap between a coil and a permanent magnet of the linear motor cannot be small. In order to solve the above problems, a linear motor for vacuum is provided, the linear motor for vacuum including: a mover having a permanent magnet; and a stator having a support member to which a coil is fixed, in which the support member includes a vacuum sealing portion that vacuum seals with a wall surface of a vacuum sample chamber, and a feed-through for supplying a current to the coil provided in the vacuum sample chamber.

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Patent Owner(s)

  • HITACHI HIGH-TECHNOLOGIES CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mizuochi, Masaki Tokyo, JP 44 144
Shibazaki, Tomotaka Tokyo, JP 8 5

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