System and method for modulation mapping
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United States of America Patent
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Jun 8, 2010
Grant Date -
Mar 1, 2007
app pub date -
May 18, 2006
filing date -
Aug 26, 2005
priority date (Note) -
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Abstract
An apparatus for providing modulation mapping is disclosed. The apparatus includes a laser source, a motion mechanism providing relative motion between the laser beam and the DUT, signal collection mechanism, which include a photodetector and appropriate electronics for collecting modulated laser light reflected from the DUT, and a display mechanism for displaying a spatial modulation map which consists of the collected modulated laser light over a selected time period and a selected area of the IC.
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