Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore
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United States of America Patent
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Mar 22, 2011
Grant Date -
Jun 26, 2008
app pub date -
Dec 5, 2007
filing date -
Dec 26, 2006
priority date (Note) -
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Abstract
A micro-electro-mechanical-system (MEMS) micromirror for use in high fill factor arrays which includes at least one stationary body and a movable body. The movable body has opposed ends and is secured to the stationary body at each of the opposed ends by a resilient primary axis pivot. A mirror support is supported by and movable with the movable body. The mirror support has a first unfettered side and a second unfettered side. A primary axis actuator is provided including a fixed portion connected to the stationary body, and a movable portion corrected to the movable body. The movable portion is adapted to move away from the fixed portion in response to an electrical potential difference between the fixed portion and the movable portion, such that the movable body rotates about the primary axis resilient pivot. A mirror is supported by the mirror support.
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