Enclosed cavity structures

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United States of America Patent

PATENT NO 11897760
APP PUB NO 20210246018A1
SERIAL NO

17246099

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Abstract

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An example of a cavity structure comprises a cavity substrate comprising a substrate surface, a cavity extending into the cavity substrate, the cavity having a cavity bottom and cavity walls, and a cap disposed on a side of the cavity opposite the cavity bottom. The cavity substrate, the cap, and the one or more cavity walls form a cavity enclosing a volume. A component can be disposed in the cavity and can extend above the substrate surface. The component can be a piezoelectric or a MEMS device. The cap can have a tophat configuration. The cavity structure can be micro-transfer printed from a source wafer to a destination substrate.

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Patent Owner(s)

Patent OwnerAddress
X-CELEPRINT LIMITED6TH FLOOR 2 GRAND CANAL SQUARE DUBLIN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cok, Ronald S Rochester, US 671 23169
Gul, Raja Fazan Cork, IE 18 40
Trindade, António José Marques Cork, IE 40 308

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