Semiconductor device

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United States of America Patent

PATENT NO 11967568
APP PUB NO 20230089797A1
SERIAL NO

17681469

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Abstract

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A semiconductor device of embodiments includes: a semiconductor layer; a first insulating layer provided on the semiconductor layer; a first metal layer provided on the first insulating layer and containing aluminum (Al); a second metal layer provided on the first insulating layer and containing aluminum (Al); and a second insulating layer provided on the first insulating layer, provided between the first metal layer and the second metal layer, having a top surface in contact with a side surface of the first metal layer and a side surface of the second metal layer, and containing silicon (Si) and nitrogen (N).

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Patent Owner(s)

  • KABUSHIKI KAISHA TOSHIBA; TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tomita, Kouta Nonoichi Ishikawa, JP 14 41

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