Airgap formation processes

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United States of America Patent

PATENT NO 11735467
SERIAL NO

17558848

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Abstract

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Processing methods may be performed to form an airgap spacer on a semiconductor substrate. The methods may include forming a spacer structure including a first material and a second material different from the first material. The methods may include forming a source/drain structure. The source/drain structure may be offset from the second material of the spacer structure by at least one other material. The methods may also include etching the second material from the spacer structure to form the airgap. The source/drain structure may be unexposed to etchant materials during the etching.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bhatnagar, Ajay Saratoga, US 16 659
Hsu, Ching-Mei Mountain View, US 30 5818
Ingle, Nitin K San Jose, US 217 35989
Lin, Sankuei Los Gatos, US 9 6
Pal, Ashish Hayward, US 23 130
Thareja, Gaurav Santa Clara, US 66 765
Wang, Anchuan San Jose, US 162 29358

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