Dry surface cleaning apparatus
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United States of America Patent
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May 11, 2004
Issued Date -
N/A
app pub date -
May 2, 2002
filing date -
Dec 7, 2001
priority date (Note) -
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Abstract
A dry surface cleaning apparatus removes surface contaminants on a surface of a workpiece. The dry surface cleaning apparatus has a laser for generating a laser beam, a sealed chamber for holding the workpiece therein, wherein the sealed chamber has a transparent window through which the laser beam is transmitted, and a laser focusing lens for converging the laser beam on a laser focus around the surface of the workpiece to generate a plasma shock wave around the laser focus.
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