Apparatus for removing a photoresist and apparatus for manufacturing a semiconductor device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11545373
APP PUB NO 20200373174A1
SERIAL NO

16715123

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Abstract

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An apparatus for fabricating a semiconductor device may include a nozzle having a slit configured to eject solution and an ultraviolet emitter provided outside the nozzle. The ultraviolet emitter and the nozzle may be configured to move horizontally. The slit may be provided on a bottom surface of the nozzle.

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Patent Owner(s)

  • SAMSUNG ELECTRONICS CO. LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheon, Jihun Suwon-si, KR 3 0
Cho, Yong-Jhin Suwon-si, KR 26 84
Jeon, Pyojin Suwon-si, KR 3 1
Lee, Hyun Jung Suwon-si, KR 74 368
Lee, Wonjun Suwon-si, KR 114 686

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