Electron energy filter with magnetic deflecting regions
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 6, 2003
Grant Date -
Mar 21, 2002
app pub date -
Feb 8, 2001
filing date -
Feb 8, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The invention relates to an electron energy filter with magnetic deflection regions and a substantially W-shaped beam path. The energy filter has at least four magnetic deflection regions, that are respectively separated from each other by drift paths in the space free from magnetic fields. The whole filter is thus symmetrical with respect to a midplane (M). The total deflection angle in the first and last deflection region is at least 135.degree., and all the deflection regions together effect a deflection of the optical axis through an angle between 90.degree. and 210.degree., preferably through 180.degree.. The energy filter has a large Helmholtz length that is greater than double the average value of the deflection radii in the deflection regions.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully