Piezoelectric drive and microvalve comprising said drive
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United States of America Patent
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Aug 26, 2014
Grant Date -
Feb 23, 2012
app pub date -
Apr 20, 2010
filing date -
Apr 24, 2009
priority date (Note) -
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Abstract
The invention relates to a piezoelectric drive, in particular for microvalves. The drive comprises a deformation layer coupled on one side to a piezoelectric layer, which is provided with at least one pair of electrodes, made of two electrodes of opposite polarities, to provide electricity. According to the invention, both electrodes of opposite polarities of the pair of electrodes are arranged together on the side of the piezoelectric layer facing away from the deformation layer. The invention also relates to a microvalve comprising at least one valve channel and a membrane that opens or closes the valve channel, where the membrane simultaneously forms the deformation layer of such a piezoelectric drive.
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