Monolithic sensor arrangement, manufacturing method and measurement method

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United States of America Patent

PATENT NO 11774389
SERIAL NO

16976348

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Abstract

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A monolithic sensor arrangement, a manufacturing method and a measurement method are disclosed. In an embodiment a monolithic gas sensor arrangement includes a sensor including a first transducer with a first sensitive layer and a second transducer with a second sensitive layer, and a readout circuit configured to generate a first measurement signal and a second measurement signal depending on the first and second transducers, wherein the sensor arrangement is a humidity sensor arrangement, wherein the first and second sensitive layers are configured to absorb water molecules, and wherein the first and second sensitive layers differ from each other in at least one property.

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Patent Owner(s)

  • SCIOSENSE B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Habibi, Hooman Eindhoven, NL 1 0
Nenadovic, Nebojsa Wijchen, NL 9 10
Suy, Hilco Son en Breugel, NL 20 88
Vanhelmont, Frederik Willem Maurits Maaseik, BE 14 192

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