Method for manufacturing an electroacoustic transducer

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United States of America Patent

PATENT NO 11661336
SERIAL NO

17487775

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Abstract

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A method for manufacturing an electroacoustic transducer includes a frame; an element moveable with respect to the frame, the moveable element including a membrane and a structure for rigidifying the membrane; a first transmission arm, the moveable element being coupled to an end of the first transmission arm; wherein a shield is used to protect the rigidification structure during a step of etching a substrate, the etching of the substrate making it possible to delimit the first transmission arm and to lighten the moveable element.

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Patent Owner(s)

  • COMMISSARIAT A L' ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Joet, Loïc Grenoble, FR 15 13

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