Two-axis device and manufacturing method therefor
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United States of America Patent
Stats
-
Mar 27, 2007
Grant Date -
Dec 22, 2005
app pub date -
Sep 28, 2004
filing date -
Jun 18, 2004
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A two-axis device is provided. The two-axis device includes a first substrate having a plurality of electrodes, a first connecting layer located on the first substrate, an actuating layer, a second connecting layer and a cover. The actuating layer is connected to the first substrate via the first connecting layer and includes a circular portion, an actuating portion, a first shaft and a second shaft. The second connecting layer is connected to the actuating layer and the cover is connected to the actuating layer via the second connecting layer. In addition, a vacuum concavity is formed by the first substrate, the first connecting layer, the actuating layer, the second connecting layer and the cover. The actuating portion and the first shaft are located in the vacuum concavity, and the second shaft extends outside of the vacuum concavity.
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