Fabrication of diffraction gratings

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United States of America Patent

PATENT NO 11733533
APP PUB NO 20220276498A1
SERIAL NO

17745457

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Abstract

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The systems and methods discussed herein are for the fabrication of diffraction gratings, such as those gratings used in waveguide combiners. The waveguide combiners discussed herein are fabricated using nanoimprint lithography (NIL) of high-index and low-index materials in combination with and directional etching high-index and low-index materials. The waveguide combiners can be additionally or alternatively formed by the directional etching of transparent substrates. The waveguide combiners that include diffraction gratings discussed herein can be formed directly on permanent transparent substrates. In other examples, the diffraction gratings can be formed on temporary substrates and transferred to a permanent, transparent substrate.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Godet, Ludovic Sunnyvale, US 313 2796
Mcmillan, Wayne San Jose, US 32 196
Meyer, Timmerman Thijssen Rutger Sunnyvale, US 87 117

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