Inter-period control system for plasma power delivery system and method of operating same

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United States of America Patent

PATENT NO 11450510
SERIAL NO

17113088

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Abstract

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A generator produces output such as delivered power, voltage, current, forward power etc. that follows a prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling sections of the pattern based on measurements taken one or more repetition periods in the past. A variable impedance match network may control the impedance presented to a radio frequency generator while the generator produces the output that follows the prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling variable impedance elements in the match during sections of the pattern based on measurements taken one or more repetition periods in the past.

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Patent Owner(s)

  • ADVANCED ENERGY INDUSTRIES, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Van, Zyl Gideon Fort Collins, US 55 982

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