Mold, production process of mold, imprint apparatus, and imprint method
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United States of America Patent
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Oct 19, 2010
Grant Date -
Sep 4, 2008
app pub date -
Feb 19, 2008
filing date -
Feb 20, 2007
priority date (Note) -
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status (Latency Note)
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Abstract
A mold for imprinting a pattern onto a resin material applied onto a substrate is constituted by a mold substrate formed of a material transparent to light in at least a part of a wavelength range of light used for alignment, an alignment structure area having an alignment structure comprising a recess portion, a pattern forming area having a pattern, and a coating layer is formed of a material having an optical characteristic different from that of the mold substrate. The coating layer is on a side wall of the recess portion.
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