Lithographic apparatus and device manufacturing method

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United States of America Patent

PATENT NO 11537038
APP PUB NO 20210173294A1
SERIAL NO

17119331

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Abstract

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Embodiments of a drain in a lithographic projection apparatus are described that have, for example, a feature which reduces inflow of gas into the drain during a period when no liquid is present in the drain. In one example, a passive liquid removal mechanism is provided such that the pressure of gas in the drain is equal to the ambient gas pressure and in another embodiment a flap is provided to close off a chamber during times when no liquid needs removing.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Donders, Sjoerd Nicolaas Lambertus Vught, NL 248 8208
Kadijk, Edwin Cornelis Eindhoven, NL 12 134
Kemper, Nicolaas Rudolf Eindhoven, NL 95 1630
Ottens, Joost Jeroen Veldhoven, NL 131 2905
Shulepov, Sergei Eindhoven, NL 59 632

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