Packaged MEMS device assembly
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United States of America Patent
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May 25, 2010
Grant Date -
Nov 6, 2008
app pub date -
May 3, 2006
filing date -
May 3, 2006
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A packaged micro-electromechanical systems (MEMS) device assembly includes a MEMS device, a substrate within which the MEMS device is disposed, and a lid disposed over the substrate. The assembly may include one or more first cavities within the lid having a predetermined volume satisfying packaging specifications for the packaged MEMS device assembly. The assembly may include one or more second cavities within the lid and one or more corresponding overflow areas within the lid, where each second cavity contains a material and each corresponding overflow area is adapted to catch overflow of the material. The assembly may include one or more third cavities within the lid and one or more channels within one of the substrate and the lid to fluidically connect the MEMS device to the third cavities.
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