Gap adjustment apparatus and gap adjustment method for adjusting gap between two objects
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United States of America Patent
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-
Oct 17, 2006
Issued Date -
N/A
app pub date -
Aug 5, 2004
filing date -
Nov 28, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A first stage and a second stage are disposed to face each other. A first object is fixed on the first stage. A first displacement sensor attached on the first stage is used to measure a distance extending from the first displacement sensor to a plane disposed in front of the first displacement sensor. A second object is fixed on the second stage. A second displacement sensor attached on the second stage is used to measure a distance extending from the second displacement sensor to a plane disposed in front of the second displacement sensor. A moving mechanism is provided to move one of the first stage and the second stage, with the movement of one stage being relative to the other stage.
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